3D Alignment Tool (3DAT): Advanced alignment tool for lithography in microfabrication of hybrid devices, to enable novel chemical, analytical, optical, and (bio)medical applications

The 3DAT is an advanced alignment tool for lithography in the microfabrication of hybrid devices, typically producing and combining structured silicon and glass substrates. It allows to align different wafers in a stack, create structures on both sides of the wafers, including non-vertical structures. To achieve this, the tool has a unique combination of features. It is a double-sided alignment tool that allows to accurately position a mask on both the front and back sides of a wafer simultaneously. This tool also has a tilting option that allows for precise alignment of lithographic masks or patterns on substrates, even when the substrate has a tilted or angled surface, or when non-vertical patterns are to be produced as for e.g. vortex chromatography applications. The 3DAT will be integrated in MICROLAB, a new microfabrication facility at VUB with open access to academia and industry. It will be a latest state-of-the-art instrument and MICROLAB will be unique in Flanders and one of a few worldwide to use it for etching of hybrid silicon/glass devices. With 3DAT microfluidic devices will be developed that move beyond the state-of-the-art in multidisciplinary fields such as (bio)pharmaceutical manufacturing, medical diagnostics, or organ-on-chip. Operating at the interface of semicon and microfluidics, it will further strengthen the unique position of MICROLAB as a member of the Flanders Chips Competence Centre (FC3), a key component of the European Chips Act