Development and validation of modal analysis techniques for failure analysis of micro electromechanical systems (MEMS)

The recent advances in micro-electromechanical systems (MEMS) have made the integration of complex systems possible. A very important issue in the successfull exploitation of these systems is the degree in which these components fail (e.g. during transportation or use).
In this project a methodology is proposed to investigate the reliability of micro systems using optical vibration measurements. In order to allow the detection and localization of faling components the use of a high resolution measurement systems is necessary. An ideal instrument to perform this task is the scanning laser Doppler vibrometer (SLDV). In this project a system identification framework that allows the damage detection of MEMS is developed.