Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components

Pedro Vynck; Bart Volckaerts; Michael Vervaeke; Heidi Ottevaere; Patrik Tuteleers; L. Cosentino; P. Finocchiaro; A. Pappalardo; Alex Hermanne; Hugo Thienpont

Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components

Pedro Vynck, Bart Volckaerts, Michael Vervaeke, Heidi Ottevaere, Patrik Tuteleers, L. Cosentino, P. Finocchiaro, A. Pappalardo, Alex Hermanne, Hugo Thienpont

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › Research

Original language	English
Title of host publication	Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002
Publication status	Published - 2002
Event	Unknown - Duration: 1 Jan 2002 → …

Conference

Conference	Unknown
Period	1/01/02 → …

Bibliographical note

Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002

Cite this

Vynck, Pedro ; Volckaerts, Bart ; Vervaeke, Michael ; Ottevaere, Heidi ; Tuteleers, Patrik ; Cosentino, L. ; Finocchiaro, P. ; Pappalardo, A. ; Hermanne, Alex ; Thienpont, Hugo. / Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components. Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002. 2002.

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title = "Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components",

author = "Pedro Vynck and Bart Volckaerts and Michael Vervaeke and Heidi Ottevaere and Patrik Tuteleers and L. Cosentino and P. Finocchiaro and A. Pappalardo and Alex Hermanne and Hugo Thienpont",

note = "Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002; null ; Conference date: 01-01-2002",

year = "2002",

language = "English",

isbn = "90-807519-1-X",

booktitle = "Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002",

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Vynck, P, Volckaerts, B, Vervaeke, M , Ottevaere, H, Tuteleers, P, Cosentino, L, Finocchiaro, P, Pappalardo, A, Hermanne, A & Thienpont, H 2002, Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components. in Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002. Unknown, 1/01/02.

Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components. / Vynck, Pedro; Volckaerts, Bart; Vervaeke, Michael ; Ottevaere, Heidi; Tuteleers, Patrik; Cosentino, L.; Finocchiaro, P.; Pappalardo, A.; Hermanne, Alex ; Thienpont, Hugo.

Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002. 2002.

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › Research

TY - GEN

T1 - Beam Monitoring enhances Deep Proton Lithography: towards High-Quality Micro-Optical Components

AU - Vynck, Pedro

AU - Volckaerts, Bart

AU - Vervaeke, Michael

AU - Ottevaere, Heidi

AU - Tuteleers, Patrik

AU - Cosentino, L.

AU - Finocchiaro, P.

AU - Pappalardo, A.

AU - Hermanne, Alex

AU - Thienpont, Hugo

N1 - Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002

PY - 2002

Y1 - 2002

M3 - Conference paper

SN - 90-807519-1-X

BT - Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, pp. 298-301, 2002

Y2 - 1 January 2002

ER -