Characterization of multilayer structures

Ali Pourkazemi (Inventor), Johan Stiens (Inventor)

Research output: Patent

Abstract

A method for determining characteristics of a layer-based structure is disclosed. The method comprises repetitively irradiating the layer-based structure with a continuous wave electromagnetic radiation and capturing as a function of time a transient part of the reflection or transmission of the continuous wave electromagnetic radiation reflected or transmitted at the different interfaces of layer-based structure. The method furthermore comprises deriving from the transient part of the reflected or transmitted continuous wave electromagnetic radiation as function of time information regarding different contributions in the transient part of the reflected or transmitted continuous wave electromagnetic radiation stemming from the reflections or transmissions at different interfaces of the layer-based structure and determining from said information at least geometric information and/or electromagnetic properties of the different layers of the layer based structure. A corresponding system also is claimed.
Original languageEnglish
Publication statusPublished - 16 Dec 2016

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