Chemical composition of thin oxide films on aluminium studied with infrared and visible spectroscopic ellipsometry

Sake Van Gils, J. Van Den Brand, C.a. Melendres, Herman Terryn, Erik Stijns

Research output: Contribution to journal › Article › peer-review

Abstract

no abstract

@article{8cf392afc32743dc9feb1398cbb63ce5,

title = "Chemical composition of thin oxide films on aluminium studied with infrared and visible spectroscopic ellipsometry",

abstract = "no abstract",

keywords = "no keywords",

author = "{Van Gils}, Sake and {Van Den Brand}, J. and C.a. Melendres and Herman Terryn and Erik Stijns",

year = "2003",

language = "English",

volume = "43",

pages = "66--71",

journal = "ATB Metallurgie, 2003",

}

TY - JOUR

T1 - Chemical composition of thin oxide films on aluminium studied with infrared and visible spectroscopic ellipsometry

AU - Van Gils, Sake

AU - Van Den Brand, J.

AU - Melendres, C.a.

AU - Terryn, Herman

AU - Stijns, Erik

PY - 2003

Y1 - 2003

N2 - no abstract

AB - no abstract

KW - no keywords

M3 - Article

VL - 43

SP - 66

EP - 71

JO - ATB Metallurgie, 2003

JF - ATB Metallurgie, 2003

ER -