Deep lithography with protons : a generic technology for the fabrication of refractive micro-optical modules

Bart Volckaerts, H. Ottevaere, Araceli Vila, Maite Muruzabal, Christof Debaes, Pedro Vynck, Patrik Tuteleers, Valerie Baukens, Alex Hermanne

Research output: Chapter in Book/Report/Conference proceedingConference paper

7 Citations (Scopus)
Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS, pp. 103-104, Kauai, Hawaii, August 21-24, 2000
Publication statusPublished - 2000
EventUnknown -
Duration: 1 Jan 2000 → …

Conference

ConferenceUnknown
Period1/01/00 → …

Bibliographical note

IEEE/LEOS International Conference on Optical MEMS, pp. 103-104, Kauai, Hawaii, August 21-24, 2000

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