Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

Bart Volckaerts; Heidi Ottevaere; Michael Vervaeke; Pedro Vynck; Christof Debaes; Rafal Krajewski; Patrik Tuteleers; Alex Hermanne; Hugo Thienpont

Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

Bart Volckaerts, Heidi Ottevaere, Michael Vervaeke, Pedro Vynck, Christof Debaes, Rafal Krajewski, Patrik Tuteleers, Alex Hermanne, Hugo Thienpont

Research output: Chapter in Book/Report/Conference proceeding › Conference paper

Original language	English
Title of host publication	Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002
Publication status	Published - 2002
Event	Unknown - Duration: 1 Jan 2002 → …

Conference

Conference	Unknown
Period	1/01/02 → …

Bibliographical note

Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

Cite this

Volckaerts, Bart ; Ottevaere, Heidi ; Vervaeke, Michael ; Vynck, Pedro ; Debaes, Christof ; Krajewski, Rafal ; Tuteleers, Patrik ; Hermanne, Alex ; Thienpont, Hugo. / Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules. Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002. 2002.

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title = "Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules",

author = "Bart Volckaerts and Heidi Ottevaere and Michael Vervaeke and Pedro Vynck and Christof Debaes and Rafal Krajewski and Patrik Tuteleers and Alex Hermanne and Hugo Thienpont",

note = "Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002; null ; Conference date: 01-01-2002",

year = "2002",

language = "English",

isbn = "90-807519-1-X",

booktitle = "Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002",

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Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules. / Volckaerts, Bart; Ottevaere, Heidi ; Vervaeke, Michael; Vynck, Pedro; Debaes, Christof; Krajewski, Rafal; Tuteleers, Patrik; Hermanne, Alex ; Thienpont, Hugo.

Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002. 2002.

Research output: Chapter in Book/Report/Conference proceeding › Conference paper

TY - GEN

T1 - Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

AU - Volckaerts, Bart

AU - Ottevaere, Heidi

AU - Vervaeke, Michael

AU - Vynck, Pedro

AU - Debaes, Christof

AU - Krajewski, Rafal

AU - Tuteleers, Patrik

AU - Hermanne, Alex

AU - Thienpont, Hugo

N1 - Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

PY - 2002

Y1 - 2002

M3 - Conference paper

SN - 90-807519-1-X

BT - Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

Y2 - 1 January 2002

ER -