Device-, Circuit-Block-level evaluation of CFET in a 4 track library

P. Schuddinck, O. Zografos, P. Weckx, P. Matagne, S. Sarkar, Y. Sherazi, R. Baert, D. Jang, D. Yakimets, A. Gupta, B. Parvais, J. Ryckaert, D. Verkest, A. Mocuta

Research output: Chapter in Book/Report/Conference proceedingConference paper

68 Citations (Scopus)

Abstract

The structure of the complementary FET (CFET) with NMOS stacked on top of PMOS, inherently yields standard cells and SRAM cells with 25% smaller layout area, 25% higher pin density and 2x higher routing flexibility than FinFET with same overall active footprint. Moreover, our work, based on advanced modelling, demonstrates that 4 track CFET can match and even outperform 5 track FinFET; without the need to lower S/D contact resistivity down to 5e-10Ωcm2 or to elevate the channel stress up to 2GPa. All gains in power-performance-area at circuit-level are maintained at block-level, making 4 track CFET a suitable candidate for N3 N2 technologies. Keywords: CFET, scaling, S/D engineering, Pi-gate.

Original languageEnglish
Title of host publication2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesT204-T205
ISBN (Electronic)9784863487178
DOIs
Publication statusPublished - 1 Jun 2019
Event39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan
Duration: 9 Jun 201914 Jun 2019

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
Volume2019-June
ISSN (Print)0743-1562

Conference

Conference39th Symposium on VLSI Technology, VLSI Technology 2019
Country/TerritoryJapan
CityKyoto
Period9/06/1914/06/19

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