Direct 3D-printing of microlens on single mode polarization-stable VCSEL chip for miniaturized optical spectroscopy

Q.I. LI, Vincent Raimbault, P.F. Calmon, Benjamin Reig, Pierluigi Debernardi, Prof. Dr. Ir. Heidi Ottevaere, Jean-Baptiste Doucet, Julien Roul, Veronique Bardinal

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
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Abstract

In this work, two-photon polymerization three-dimensional laser writing is used to integrate a microlens on the surface of a single mode polarization-stable vertical-cavity surface-emitting laser (VCSEL) to be used as a current-driven tunable source in a compact optical guided-wave gas sensor. The writing conditions are optimized to enable on-demand room temperature and single-step fabrication at a post-mounting stage. We show that a writing time of 5 min is sufficient to fabricate a microlens that efficiently reduces the VCSEL beam divergence, without significant change on its emitted power or polarization stability. The lens addition reduces the spectral available range at high injection currents. A two-dimensional optical modeling of the gain characteristics is used to explain this effect and a new transverse design is proposed to avoid this issue.
Original languageEnglish
Article number033501
Pages (from-to)1-13
Number of pages13
JournalJournal of optical microsystems
Volume3
Issue number3
DOIs
Publication statusPublished - 1 Jul 2023

Bibliographical note

Funding Information:
This work was supported by Agence Nationale de la Recherche (ANR) (Gant No. ANR-15-CE19-0012 DOCT-VCSEL). The authors gratefully acknowledge Philipp Gerlach, who was working for Philips Ulm Photonics when contributing to this work and now with pmdindustrial gmbH and Pr. Philippe Menini and Pr. Thierry Camps from LAAS-CNRS for fruitful discussions. This work was supported by LAAS-CNRS micro and nanotechnologies platform, a member of the RENATECH French national network. This research was also supported by the Methusalem and Hercules foundations and the OZR of the Vrije Universiteit Brussel (VUB).

Publisher Copyright:
© The Authors.

Keywords

  • IP-DIP

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