Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

Koen Vanmol; Al Ameen Abdul Nazar; Hugo Thienpont; Francesco Ferranti; Jürgen Van Erps

doi:10.1364/OE.514237

Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

Koen Vanmol, Al Ameen Abdul Nazar, Hugo Thienpont, Francesco Ferranti, Jürgen Van Erps

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

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Abstract

We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

Original language	English
Pages (from-to)	10190 - 10203
Number of pages	14
Journal	Optics Express
Volume	32
Issue number	6
DOIs	https://doi.org/10.1364/OE.514237
Publication status	Published - 11 Mar 2024

Bibliographical note

Funding Information:
Funding. Fonds Wetenschappelijk Onderzoek (12E2923N); Interreg Vlaanderen-Nederland; Interreg North-West Europe; Flanders Make; Belgian Federal Science Policy Office; Vrije Universiteit Brussel.

Publisher Copyright:
© 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.

Keywords

OPTICS

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10.1364/OE.514237Licence: Other

2024 - K. Van Mol - Fabrication of multilevel metalenses using multiphoton lithography-from design to evaluation
Optica Publishing Group Open Access License for Publisher-Formatted Journal Article PDFs (Versions of Record) Open access journal article PDFs may be governed by the Optica Publishing Group Open Access Publishing Agreement signed by the author and any applicable copyright laws. Authors and readers may use, reuse, and build upon the article, or use it for text or data mining without asking prior permission from the publisher or the Author(s), as long as the purpose is non-commercial and appropriate attribution is maintained.
Final published version, 26.6 MBLicence: Other

1 Active
2 Finished

FWOTM1115: Generic 3D micro-structured optical waveguide interconnect platform for photonic integrated circuits
Van Erps, J. & Vanmol, K.
1/10/22 → 30/09/25
Project: Fundamental
EUAR1: Interreg: Photonics Pilotline
Thienpont, H. & Van Erps, J.
1/04/19 → 31/03/22
Project: Applied
EU598: Open-Innovation Photonics pilot for NWE
Van Erps, J.
25/10/18 → 24/10/22
Project: Applied

Cite this

@article{fe8b823449174f9d86eabac12568f706,

title = "Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation",

abstract = "We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.",

keywords = "OPTICS",

author = "Koen Vanmol and {Abdul Nazar}, {Al Ameen} and Hugo Thienpont and Francesco Ferranti and {Van Erps}, J{\"u}rgen",

note = "Funding Information: Funding. Fonds Wetenschappelijk Onderzoek (12E2923N); Interreg Vlaanderen-Nederland; Interreg North-West Europe; Flanders Make; Belgian Federal Science Policy Office; Vrije Universiteit Brussel. Publisher Copyright: {\textcopyright} 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.",

year = "2024",

month = mar,

day = "11",

doi = "10.1364/OE.514237",

language = "English",

volume = "32",

pages = "10190 -- 10203",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "6",

}

TY - JOUR

T1 - Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

AU - Vanmol, Koen

AU - Abdul Nazar, Al Ameen

AU - Thienpont, Hugo

AU - Ferranti, Francesco

AU - Van Erps, Jürgen

N1 - Funding Information: Funding. Fonds Wetenschappelijk Onderzoek (12E2923N); Interreg Vlaanderen-Nederland; Interreg North-West Europe; Flanders Make; Belgian Federal Science Policy Office; Vrije Universiteit Brussel. Publisher Copyright: © 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.

PY - 2024/3/11

Y1 - 2024/3/11

N2 - We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

AB - We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

KW - OPTICS

U2 - 10.1364/OE.514237

DO - 10.1364/OE.514237

M3 - Article

VL - 32

SP - 10190

EP - 10203

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 6

ER -

Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

Abstract

Bibliographical note

Keywords

Access to Document

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Projects

FWOTM1115: Generic 3D micro-structured optical waveguide interconnect platform for photonic integrated circuits

EUAR1: Interreg: Photonics Pilotline

EU598: Open-Innovation Photonics pilot for NWE

Cite this