| Original language | English |
|---|---|
| Pages (from-to) | 887-890 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 19 |
| Issue number | 1/apr |
| Publication status | Published - 1992 |
Bibliographical note
Microelectronic Engineering, Vol. 19, Nr. 1-4, pp. 887-890.Cite this
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