Immobilization- and label-free sensing of biomolecules solvated in nanoliter liquids at (sub)- THz wave frequencies with resonating sensor structures featuring loaded Q-factors above 10^4

Proof-of-concept of a hybrid integrated ultra-sensitive high-Q resonator structure, has been demonstrated in the past. It is a remarkable feature that such high Q-factor can be obtained in the presence of highly absorbing liquids such as water. Mechanical stability measurements of this proof-of-concept solution show an extreme low frequency (<100ppm) and amplitude (<40ppm) drift after 6 hours. In this paper we also report on the progress towards a first fully integrated solution compatible with micro-fluidics and HPLC systems and discuss on various applications in life sciences: biomolecule concentration measurements, monitoring biochemical reactions or the denaturation of biomolecules.