Ion Micro-Beam Diagnostics with scintillators for Application of deep Lithography with Particles

L. Consentino; P. Finocchiaria; A. Pappalardo; Alex Hermanne; Hugo Thienpont; Michael Vervaeke; Bart Volckaerts; Pedro Vynck

Ion Micro-Beam Diagnostics with scintillators for Application of deep Lithography with Particles

L. Consentino, P. Finocchiaria, A. Pappalardo, Alex Hermanne, Hugo Thienpont, Michael Vervaeke, Bart Volckaerts, Pedro Vynck

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Original language	English
Pages (from-to)	774-777
Number of pages	4
Journal	IEEE Trans. Nucl. Sci.
Volume	50
Publication status	Published - 2003

Bibliographical note

IEEE Trans. Nucl. Sci., Vol. 50, pp. 774-777, 2003

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title = "Ion Micro-Beam Diagnostics with scintillators for Application of deep Lithography with Particles",

author = "L. Consentino and P. Finocchiaria and A. Pappalardo and Alex Hermanne and Hugo Thienpont and Michael Vervaeke and Bart Volckaerts and Pedro Vynck",

note = "IEEE Trans. Nucl. Sci., Vol. 50, pp. 774-777, 2003",

year = "2003",

language = "English",

volume = "50",

pages = "774--777",

journal = "IEEE Trans. Nucl. Sci.",

issn = "0018-9499",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Ion Micro-Beam Diagnostics with scintillators for Application of deep Lithography with Particles

AU - Consentino, L.

AU - Finocchiaria, P.

AU - Pappalardo, A.

AU - Hermanne, Alex

AU - Thienpont, Hugo

AU - Vervaeke, Michael

AU - Volckaerts, Bart

AU - Vynck, Pedro

N1 - IEEE Trans. Nucl. Sci., Vol. 50, pp. 774-777, 2003

PY - 2003

Y1 - 2003

M3 - Article

SN - 0018-9499

VL - 50

SP - 774

EP - 777

JO - IEEE Trans. Nucl. Sci.

JF - IEEE Trans. Nucl. Sci.

ER -