Optimised microlens shape by reflow of multiple layers of photoresist: Experimental data and lens shape calculations

Jan Genoe, P. Heremans, Maarten Kuijk, Roger Vounckx, Gustaaf Borghs

Research output: Chapter in Book/Report/Conference proceedingMeeting abstract (Book)

Original languageEnglish
Title of host publicationEOS Topical Meeting on Microlens Arrays
PublisherEOS Topical Meeting on Microlens Arrays, National Physical Labratory, London, UK.
Publication statusPublished - 1997
EventUnknown -
Duration: 1 Jan 1997 → …

Conference

ConferenceUnknown
Period1/01/97 → …

Bibliographical note

EOS Topical Meeting on Microlens Arrays, National Physical Labratory, London, UK.

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