Oxidation and hydratation of aluminium: qualitative composition and growth of the oxide layer using IR and visible spectroscopic ellipsometry

C.a. Melendres, Sake Van Gils, Herman Terryn, Erik Stijns

Research output: Contribution to journalArticle

Abstract

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Original languageEnglish
JournalThird international symposium on spectroscopic Ellipsometry, Austria, 2003
Publication statusPublished - 2003

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