Oxide-confined VCSELs fabricated with a simple self-aligned process flow

Ludovic Marigo Lombart, S. Calvez, A. Arnoult, Hugo Thienpont, Krassimir Panayotov, G. Almuneau

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We propose a simplified and easier fabrication process flow for the manufacturing of AlOx-confined vertical-cavity surface-emitting lasers (VCSELs) based on combining the oxidation step with a self-aligned process, allowing the mesa etching and two successive lift-off steps based on a single lithography step. The electro-optical confinement achieved by standard lateral oxidation enables a low threshold and a single mode behavior for the VCSEL. This simplified process can largely improve VCSEL manufacturing by reducing the processing time and costs compared to the standard VCSEL process.
Original languageEnglish
Article number125004
Number of pages5
JournalSemicond. Sci. Technol.
Volume32
Issue number12
DOIs
Publication statusPublished - Dec 2017

Keywords

  • LASERS

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