Replicating micro-optical structures using soft embossing technique

X. Shang; J. De Smet; P. Joshi; Esma Islamaj; D. Cuypers; Michael Vervaeke; Jurgen Van Erps; Hugo Thienpont; H. De Smet

doi:10.1117/12.2065912

Replicating micro-optical structures using soft embossing technique

X. Shang, J. De Smet, P. Joshi, Esma Islamaj, D. Cuypers, Michael Vervaeke, Jurgen Van Erps, Hugo Thienpont, H. De Smet

Applied Physics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference paper

7 Citations (Scopus)

Abstract

In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.

Original language	English
Title of host publication	Proc. SPIE,30th European Mask and Lithography conference
Publisher	SPIE
Volume	9231
DOIs	https://doi.org/10.1117/12.2065912
Publication status	Published - 2014
Event	30th European Mask and Lithography Conference - Dresden, Germany Duration: 24 Jun 2014 → 25 Jun 2014

Conference

Conference	30th European Mask and Lithography Conference
Abbreviated title	EMLC - 2014
Country/Territory	Germany
City	Dresden
Period	24/06/14 → 25/06/14

Keywords

soft embossing; template lithography; UV curable resins; PDMS molding; light steering; grating diffraction

Access to Document

10.1117/12.2065912

Handle.net

Persistent link

Cite this

@inproceedings{f9911d2917b2436dad5ae34cd4f6b1af,

title = "Replicating micro-optical structures using soft embossing technique",

abstract = "In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.",

keywords = "soft embossing; template lithography; UV curable resins; PDMS molding; light steering; grating diffraction ",

author = "X. Shang and {De Smet}, J. and P. Joshi and Esma Islamaj and D. Cuypers and Michael Vervaeke and {Van Erps}, Jurgen and Hugo Thienpont and {De Smet}, H.",

year = "2014",

doi = "10.1117/12.2065912",

language = "English",

volume = "9231",

booktitle = "Proc. SPIE,30th European Mask and Lithography conference",

publisher = "SPIE",

address = "United States",

note = "30th European Mask and Lithography Conference, EMLC - 2014 ; Conference date: 24-06-2014 Through 25-06-2014",

}

Shang, X, De Smet, J, Joshi, P, Islamaj, E, Cuypers, D, Vervaeke, M , Van Erps, J , Thienpont, H & De Smet, H 2014, Replicating micro-optical structures using soft embossing technique. in Proc. SPIE,30th European Mask and Lithography conference. vol. 9231, UNSP 92310H, SPIE, 30th European Mask and Lithography Conference, Dresden, Germany, 24/06/14. https://doi.org/10.1117/12.2065912

TY - GEN

T1 - Replicating micro-optical structures using soft embossing technique

AU - Shang, X.

AU - De Smet, J.

AU - Joshi, P.

AU - Islamaj, Esma

AU - Cuypers, D.

AU - Vervaeke, Michael

AU - Van Erps, Jurgen

AU - Thienpont, Hugo

AU - De Smet, H.

PY - 2014

Y1 - 2014

N2 - In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.

AB - In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.

KW - soft embossing; template lithography; UV curable resins; PDMS molding; light steering; grating diffraction

U2 - 10.1117/12.2065912

DO - 10.1117/12.2065912

M3 - Conference paper

VL - 9231

BT - Proc. SPIE,30th European Mask and Lithography conference

PB - SPIE

T2 - 30th European Mask and Lithography Conference

Y2 - 24 June 2014 through 25 June 2014

ER -

Replicating micro-optical structures using soft embossing technique

Abstract

Conference

Keywords

Access to Document

Handle.net

Fingerprint

Cite this