Replication of refractive micro opto-mechanical components made with Deep lithography with protons

Patrik Tuteleers, Pedro Vynck, Bart Volckaerts, H. Ottevaere, Valerie Baukens, Christof Debaes, Alex Hermanne

Research output: Chapter in Book/Report/Conference proceeding › Conference paper

18 Citations (Scopus)

Original language	English
Title of host publication	Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001
Publication status	Published - 2001
Event	Unknown - Duration: 1 Jan 2001 → …

Conference	Unknown
Period	1/01/01 → …

Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001

Cite this

@inproceedings{6d841409f67e4d3f9b4de069244fc00f,

title = "Replication of refractive micro opto-mechanical components made with Deep lithography with protons",

author = "Patrik Tuteleers and Pedro Vynck and Bart Volckaerts and H. Ottevaere and Valerie Baukens and Christof Debaes and Alex Hermanne",

note = "Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001; null ; Conference date: 01-01-2001",

year = "2001",

language = "English",

booktitle = "Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001",

}

Replication of refractive micro opto-mechanical components made with Deep lithography with protons. / Tuteleers, Patrik; Vynck, Pedro; Volckaerts, Bart; Ottevaere, H.; Baukens, Valerie; Debaes, Christof; Hermanne, Alex.

Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001. 2001.

Research output: Chapter in Book/Report/Conference proceeding › Conference paper

TY - GEN

T1 - Replication of refractive micro opto-mechanical components made with Deep lithography with protons

AU - Tuteleers, Patrik

AU - Vynck, Pedro

AU - Volckaerts, Bart

AU - Ottevaere, H.

AU - Baukens, Valerie

AU - Debaes, Christof

AU - Hermanne, Alex

N1 - Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001

PY - 2001

Y1 - 2001

M3 - Conference paper

BT - Proc. SPIE Vol. 4408, MEMS/MOEMS (DTIP 2001); Cannes, France, pp. 329-337, 2001

Y2 - 1 January 2001

ER -