Spectroscopic ellipsometry, a non-destructive technique for surface analysis

Tom SCHRAM, ALEXIS FRANQUET, Herman Terryn, Jean Vereecken

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
JournalUnknown Journal
Publication statusPublished - 1999

Bibliographical note

Advanced Engineering Materials, 1, 63-65

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