Abstract
In this paper we present the recent results of the integrated 2D refractive index distribution (projections) measurements of high aspect ratio optical structures made with low-cost fabrication techniques. Measurements methodology base on 2D integrated phase measurements by means of interferometric method. Phase distribution measurements were followed by dedicated algorithm of refractive index determining. The corrected projections captured for multiple angular position of an object are the basis for 3D tomagraphc reconstruction of refractive index n(x,y,z). Presented measurements play an important role in the proper modeling of the new family of low-cost microinterferometric systems.
Original language | English |
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Pages (from-to) | 161-164 |
Number of pages | 4 |
Journal | Przeglad Elektrotechniczny |
Volume | 84 |
Publication status | Published - 2008 |
Keywords
- FABRICATION; TOOL