Study of silane films on aluminium by means of spectroscopic ellipsometry and Auger electron spectroscopy

ALEXIS FRANQUET, Jean Vereecken, Thomas VAN SCHAFTINGHEN, Herman Terryn, V. Subramanian, W.j. Van Ooij

Research output: Contribution to journal › Editorial

Extended Abstracts 2nd International Symposium on Aluminium Surface Science and Technology, 21-25.05.2000, Manchester, England, 44

Cite this

@article{42a75049b33640eabacc3e54712b8f0d,

title = "Study of silane films on aluminium by means of spectroscopic ellipsometry and Auger electron spectroscopy",

author = "ALEXIS FRANQUET and Jean Vereecken and {VAN SCHAFTINGHEN}, Thomas and Herman Terryn and V. Subramanian and {Van Ooij}, W.j.",

note = "Extended Abstracts 2nd International Symposium on Aluminium Surface Science and Technology, 21-25.05.2000, Manchester, England, 44",

year = "2000",

language = "English",

journal = "Unknown Journal",

}

TY - JOUR

T1 - Study of silane films on aluminium by means of spectroscopic ellipsometry and Auger electron spectroscopy

AU - FRANQUET, ALEXIS

AU - Vereecken, Jean

AU - VAN SCHAFTINGHEN, Thomas

AU - Terryn, Herman

AU - Subramanian, V.

AU - Van Ooij, W.j.

N1 - Extended Abstracts 2nd International Symposium on Aluminium Surface Science and Technology, 21-25.05.2000, Manchester, England, 44

PY - 2000

Y1 - 2000

M3 - Editorial

JO - Unknown Journal

JF - Unknown Journal

ER -