Study of silane films on aluminium by means of spectroscopic ellipsometry and Auger electron spectroscopy

ALEXIS FRANQUET, Jean Vereecken, Thomas VAN SCHAFTINGHEN, Herman Terryn, V. Subramanian, W.j. Van Ooij

Research output: Contribution to journalEditorial

Original languageEnglish
JournalUnknown Journal
Publication statusPublished - 2000

Bibliographical note

Extended Abstracts 2nd International Symposium on Aluminium Surface Science and Technology, 21-25.05.2000, Manchester, England, 44

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