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Electrodeposition for 3D integration

  • Ole Lühn ((PhD) Student)
  • Jean-Pierre Celis (Promotor)
  • Johan Deconinck (Jury)

Student thesis: Doctoral Thesis

Date of AwardDec 2009
Original languageEnglish
SupervisorJohan Deconinck (Jury) & Jean-Pierre Celis (Promotor)

Keywords

  • copper
  • super filling

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