A CMOS compatible III-v-on-300 mm SI technology for future high-speed communication systems: Challenges and possibilities

Abhitosh Vais, Annie Kumar, Guillaume Boccardi, Sachin Yadav, Yves Mols, Reynald Alcotte, Bjorn Vermeersch, Marc Ingels, Uthayasankaran Peralagu, Cesar Roda Neve, Bruno Ghyselen, Bertrand Parvais, Piet Wambacq, Bernardette Kunert, Nadine Collaert

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III-V semiconductor-based devices, in particular InP heterojunction bipolar transistors, are a strong contender for next-generation high-speed communication systems. In this paper, we present motivation for the upscaling of III-V technology on to 300 mm Si platforms. A comparison of various options for such III-V on Si technology is described. The challenges in the way to achieve its integration into existing CMOS platform and possibilities to overcome them are shown. We describe imec's path to demonstrate a CMOS compatible III-V-on-300 mm Si technology with the most recent results.

Originele taal-2English
TitelKey Enabling Technologies for Future Wireless, Wired, Optical and Satcom Applications
UitgeverijRiver Publishers
Pagina's27-40
Aantal pagina's14
ISBN van elektronische versie9788770046640
ISBN van geprinte versie9788770046657
StatusPublished - 22 aug 2024

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Publisher Copyright:
© 2024 River Publishers.

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