Chemical Vapor Deposition of Ionic Liquids for the Fabrication of Ionogel Films and Patterns

Martin Obst, Giel Arnauts, Alexander John Cruz, Maider Calderon Gonzalez, Kristof Marcoen, Tom Hauffman, Rob Ameloot

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Samenvatting

Film deposition and high-resolution patterning of ionic liquids (ILs) remain a challenge, despite a broad range of applications that would benefit from this type of processing. Here, we demonstrate for the first time the chemical vapor deposition (CVD) of ILs. The IL-CVD method is based on the formation of a non-volatile IL through the reaction of two vaporized precursors. Ionogel micropatterns can be easily obtained via the combination of IL-CVD and standard photolithography, and the resulting microdrop arrays can be used as microreactors. The IL-CVD approach will facilitate leveraging the properties of ILs in a range of applications and microfabricated devices.

Originele taal-2English
Pagina's (van-tot)1-5
Aantal pagina's5
TijdschriftAngewandte Chemie - International Edition
Volume60
Nummer van het tijdschrift49
DOI's
StatusPublished - 3 sep 2021

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