Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

Bart Volckaerts, Heidi Ottevaere, Michael Vervaeke, Pedro Vynck, Christof Debaes, Rafal Krajewski, Patrik Tuteleers, Alex Hermanne, Hugo Thienpont

Onderzoeksoutput: Conference paper

Originele taal-2English
TitelProc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002
StatusPublished - 2002
EvenementUnknown -
Duur: 1 jan 2002 → …

Conference

ConferenceUnknown
Periode1/01/02 → …

Bibliografische nota

Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

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