Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

Bart Volckaerts; Heidi Ottevaere; Michael Vervaeke; Pedro Vynck; Christof Debaes; Rafal Krajewski; Patrik Tuteleers; Alex Hermanne; Hugo Thienpont

Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

Bart Volckaerts, Heidi Ottevaere, Michael Vervaeke, Pedro Vynck, Christof Debaes, Rafal Krajewski, Patrik Tuteleers, Alex Hermanne, Hugo Thienpont

Onderzoeksoutput: Conference paper

Originele taal-2	English
Titel	Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002
Status	Published - 2002
Evenement	Unknown - Duur: 1 jan. 2002 → …

Conference

Conference	Unknown
Periode	1/01/02 → …

Bibliografische nota

Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

Citeer dit

@inproceedings{292547799e574609a6de49d73e4f7d14,

title = "Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules",

author = "Bart Volckaerts and Heidi Ottevaere and Michael Vervaeke and Pedro Vynck and Christof Debaes and Rafal Krajewski and Patrik Tuteleers and Alex Hermanne and Hugo Thienpont",

note = "Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002; Unknown ; Conference date: 01-01-2002",

year = "2002",

language = "English",

isbn = "90-807519-1-X",

booktitle = "Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002",

}

TY - GEN

T1 - Deep Lithography with Protons for Mastering Refractive Micro-Optical Components and Modules

AU - Volckaerts, Bart

AU - Ottevaere, Heidi

AU - Vervaeke, Michael

AU - Vynck, Pedro

AU - Debaes, Christof

AU - Krajewski, Rafal

AU - Tuteleers, Patrik

AU - Hermanne, Alex

AU - Thienpont, Hugo

N1 - Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

PY - 2002

Y1 - 2002

M3 - Conference paper

SN - 90-807519-1-X

BT - Proc. of the 2002 Symposium of the IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 297-300, 2002

T2 - Unknown

Y2 - 1 January 2002

ER -