Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

Koen Vanmol; Al Ameen Abdul Nazar; Hugo Thienpont; Francesco Ferranti; Jürgen Van Erps

doi:10.1364/OE.514237

Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

Koen Vanmol, Al Ameen Abdul Nazar, Hugo Thienpont, Francesco Ferranti, Jürgen Van Erps

Onderzoeksoutput: Article › peer review

14 Citaten (Scopus)

103 Downloads (Pure)

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We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

Originele taal-2	English
Pagina's (van-tot)	10190 - 10203
Aantal pagina's	14
Tijdschrift	Optics Express
Volume	32
Nummer van het tijdschrift	6
DOI's	https://doi.org/10.1364/OE.514237
Status	Published - 11 mrt. 2024

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Publisher Copyright:
© 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.

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10.1364/OE.514237Licentie: Other

2024 - K. Van Mol - Fabrication of multilevel metalenses using multiphoton lithography-from design to evaluation
Optica Publishing Group Open Access License for Publisher-Formatted Journal Article PDFs (Versions of Record) Open access journal article PDFs may be governed by the Optica Publishing Group Open Access Publishing Agreement signed by the author and any applicable copyright laws. Authors and readers may use, reuse, and build upon the article, or use it for text or data mining without asking prior permission from the publisher or the Author(s), as long as the purpose is non-commercial and appropriate attribution is maintained.
Final published version, 26,6 MBLicentie: Other

1 Actief
2 Afgelopen

FWOTM1115: Generiek 3D micro-gestructureerde optische golfgeleiders interconnectieplatform voor fotonische geïntegreerde schakelingen
Van Erps, J. & Vanmol, K.
1/10/22 → 30/09/25
Project: Fundamenteel
EUAR1: Interreg: Fotonica Pilootlijn
Thienpont, H. & Van Erps, J.
1/04/19 → 31/03/22
Project: Toegepast
EU598: OIP4NWE
Van Erps, J.
25/10/18 → 24/10/22
Project: Toegepast

Citeer dit

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abstract = "We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.",

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note = "Funding Information: Funding. Fonds Wetenschappelijk Onderzoek (12E2923N); Interreg Vlaanderen-Nederland; Interreg North-West Europe; Flanders Make; Belgian Federal Science Policy Office; Vrije Universiteit Brussel. Publisher Copyright: {\textcopyright} 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.",

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AU - Van Erps, Jürgen

N1 - Funding Information: Funding. Fonds Wetenschappelijk Onderzoek (12E2923N); Interreg Vlaanderen-Nederland; Interreg North-West Europe; Flanders Make; Belgian Federal Science Policy Office; Vrije Universiteit Brussel. Publisher Copyright: © 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.

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AB - We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high -numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.96, and optimize the fabrication process towards nanostructure shape reproducibility. We perform optical characterization of the metalenses towards spot size, focusing efficiency, and optical functionality with a fiber beam collimation design, and compare their performance with refractive and diffractive counterparts fabricated with the same technology.

KW - OPTICS

U2 - 10.1364/OE.514237

DO - 10.1364/OE.514237

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Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation

Samenvatting

Bibliografische nota

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Vingerafdruk

Projecten

FWOTM1115: Generiek 3D micro-gestructureerde optische golfgeleiders interconnectieplatform voor fotonische geïntegreerde schakelingen

EUAR1: Interreg: Fotonica Pilootlijn

EU598: OIP4NWE

Citeer dit