OLED integrated silicon membranes for light-modulation devices

Organic light-emitting diodes (OLEDs) are most frequently used for display purposes and while they have also been utilized in sensing applications, their innate compliance has not previously been exploited for these applications. However, in this manuscript it is shown that OLEDs are compatible with microfabrication methods used in the production of micro mechanical devices. In particular it is shown that the compliance of OLEDs can be utilized in, and not limited to, a new generation of opto-mechanical pressure sensors. A fabrication process for a light-modulating pressure sensor is described. Prototypes were fabricated and tested and the response compared to an analytical theory developed by the authors. It is shown with simple circuitry, a resolution of 11.4 Pa up to 350 kPa is attainable using this technology.