Oxide-confined VCSELs fabricated with a simple self-aligned process flow

Ludovic Marigo Lombart, S. Calvez, A. Arnoult, Hugo Thienpont, Krassimir Panayotov, G. Almuneau

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4 Citaten (Scopus)

Samenvatting

We propose a simplified and easier fabrication process flow for the manufacturing of AlOx-confined vertical-cavity surface-emitting lasers (VCSELs) based on combining the oxidation step with a self-aligned process, allowing the mesa etching and two successive lift-off steps based on a single lithography step. The electro-optical confinement achieved by standard lateral oxidation enables a low threshold and a single mode behavior for the VCSEL. This simplified process can largely improve VCSEL manufacturing by reducing the processing time and costs compared to the standard VCSEL process.
Originele taal-2English
Artikelnummer125004
Aantal pagina's5
TijdschriftSemicond. Sci. Technol.
Volume32
Nummer van het tijdschrift12
DOI's
StatusPublished - dec 2017

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