Simulations for a Nickel electrodeposition process on wafer substrates

Bart Van Den Bossche, Gert Floridor, Gert Nelissen, Johan Deconinck

Onderzoeksoutput: Commissioned report

Originele taal-2	English
Uitgeverij	consulting report for Siemens (D), January 2003
Status	Published - 6 jan 2003

consulting report for Siemens (D), January 2003

Citeer dit

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title = "Simulations for a Nickel electrodeposition process on wafer substrates",

author = "{Van Den Bossche}, Bart and Gert Floridor and Gert Nelissen and Johan Deconinck",

note = "consulting report for Siemens (D), January 2003",

year = "2003",

month = jan,

day = "6",

language = "English",

publisher = "consulting report for Siemens (D), January 2003",

}

TY - BOOK

T1 - Simulations for a Nickel electrodeposition process on wafer substrates

AU - Van Den Bossche, Bart

AU - Floridor, Gert

AU - Nelissen, Gert

AU - Deconinck, Johan

N1 - consulting report for Siemens (D), January 2003

PY - 2003/1/6

Y1 - 2003/1/6

M3 - Commissioned report

BT - Simulations for a Nickel electrodeposition process on wafer substrates

PB - consulting report for Siemens (D), January 2003

ER -